Statistical Aspects of Size Functions for the Description of Random Shapes: Applications to Problems of Lithography in Microelectronics

DOI10.1007/978-3-540-71992-2_7zbMath1308.62208OpenAlexW35396819MaRDI QIDQ3618069

Alessandra Micheletti, Filippo Terragni, Mauro Vasconi

Publication date: 31 March 2009

Published in: Progress in Industrial Mathematics at ECMI 2006 (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/978-3-540-71992-2_7

Mathematics Subject Classification ID

Applications of statistics in engineering and industry; control charts (62P30)

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