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Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design - MaRDI portal

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Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design

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Publication:3626968

DOI10.1002/JNM.699zbMATH Open1162.82324OpenAlexW4256455381MaRDI QIDQ3626968

Author name not available (Why is that?)

Publication date: 14 May 2009

Published in: (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/jnm.699



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