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ANALYSIS OF REDISTRIBUTION OF RADIATION DEFECTS TAKING INTO ACCOUNT DIFFUSION AND SEVERAL SECONDARY PROCESSES - MaRDI portal

ANALYSIS OF REDISTRIBUTION OF RADIATION DEFECTS TAKING INTO ACCOUNT DIFFUSION AND SEVERAL SECONDARY PROCESSES

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Publication:3631267

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DOI10.1142/S0217984908017230zbMath1171.82350MaRDI QIDQ3631267

E. L. Pankratov

Publication date: 5 June 2009

Published in: Modern Physics Letters B (Search for Journal in Brave)

zbMATH Keywords

ion implantation radiation defects alternating approach for modeling diffusion and secondary processes

Mathematics Subject Classification ID

Statistical mechanics of semiconductors (82D37)

Cites Work

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