Microvia fill process control
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Publication:3632928
DOI10.1080/00207170802366080zbMath1163.49042OpenAlexW2034929609MaRDI QIDQ3632928
Publication date: 16 June 2009
Published in: International Journal of Control (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/00207170802366080
Applications of optimal control and differential games (49N90) Production models (90B30) Classical flows, reactions, etc. in chemistry (92E20)
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