Theory of rf-driven plasma sheath
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Publication:3653639
DOI10.1088/0031-8949/74/6/015zbMATH Open1181.82062OpenAlexW1975615858MaRDI QIDQ3653639
Author name not available (Why is that?)
Publication date: 28 December 2009
Published in: (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1088/0031-8949/74/6/015
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