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Publication:3735092
zbMath0599.68053MaRDI QIDQ3735092
Michael R. Garey, Ron Yair Pinter
Publication date: 1986
Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.
dynamic programmingdata structurescomputational geometrycombinatorial algorithmsefficient algorithmsbeam widthsbeam positionselectron lithographyintegrated circuit wafers