Substrate-constrained deformation in thin metal films: numerical case studies

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DOI10.1504/IJTAMM.2009.022471zbMath1274.74183OpenAlexW2134026633MaRDI QIDQ373738

Yu-Lin Shen

Publication date: 25 October 2013

Published in: International Journal of Theoretical and Applied Multiscale Mechanics (IJTAMM) (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1504/ijtamm.2009.022471

zbMATH Keywords

modelling finite element method microstructure stress FEM plastic deformation thin films microelectromechanical systems mechanical properties MEMS aluminium metal films substrate material

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Thin films (74K35)

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