Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges

DOI10.1007/S00158-012-0804-6zbMath1274.74346OpenAlexW2013123465MaRDI QIDQ381906

D. N. Pawaskar, M. M. Joglekar

Publication date: 15 November 2013

Published in: Structural and Multidisciplinary Optimization (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00158-012-0804-6

zbMATH Keywords

shape optimizationfinite element analysispenalty methodmicroelectromechanical systemspull-in instabilitynonprismatic beams

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Finite element methods applied to problems in solid mechanics (74S05) Micromechanics of solids (74M25) Topological methods for optimization problems in solid mechanics (74P15)

Uses Software

• COMSOL
• Optimization Toolbox
• BRENT
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Cites Work

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• The nonlinear electrostatic behavior for shaped electrode actuators
• On the static and dynamic response of electrostatic actuators
• Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
• A reproducing kernel particle method for meshless analysis of microelectromechanical systems
• Electrostatic BEM for MEMS with thin conducting plates and shells
• Microbeam pull-in voltage topology optimization including material deposition constraint
• Numerical Optimization
• Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
• Topology optimization of resonating structures using SIMP method
• Dynamics and Global Stability of Beam-based Electrostatic Microactuators
• A Simplex Method for Function Minimization
• Design of multiphysics actuators using topology optimization. I: One-material structures. II: Two-material structures.

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