The Isolation Oxidation of Silicon: The Reaction-Controlled Case
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Publication:3826286
DOI10.1137/0149064zbMath0672.76095OpenAlexW1993179343MaRDI QIDQ3826286
Publication date: 1989
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1137/0149064
asymptotic expansionstwo-dimensional isolation oxidation of siliconlimit of reaction-controlled oxidationnondimensional reaction coefficient
Diffusion (76R50) Stokes and related (Oseen, etc.) flows (76D07) Asymptotic expansions of solutions to PDEs (35C20)
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