Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS

DOI10.1007/s11012-013-9767-yzbMath1293.74006OpenAlexW1982769279MaRDI QIDQ400172

Alberto Corigliano, Biagio De Masi, Leonardo Baldasarre, Luca Magagnin, Attilio Frangi, Raffaele Ardito

Publication date: 21 August 2014

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11012-013-9767-y

zbMATH Keywords

finite element methodexperimentsadhesionstiction

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Micromechanics of solids (74M25) Experimental work for problems pertaining to mechanics of deformable solids (74-05)

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Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps

Cites Work

• Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems