A resonant micro accelerometer based on electrostatic stiffness variation

DOI10.1007/s11012-013-9768-xzbMath1293.74095OpenAlexW2051532529MaRDI QIDQ400187

Claudia Comi, Alberto Corigliano, Sarah Zerbini, Aldo Ghisi

Publication date: 21 August 2014

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11012-013-9768-x

zbMATH Keywords

MEMSpull-in instabilityelectrostatic stiffnessout-of plane sensingresonant accelerometer

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Electromagnetic effects in solid mechanics (74F15)

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