Model for the Kinematics of Polymer Dissolution

DOI10.1147/RD.212.0131zbMATH Open0347.92009OpenAlexW2049621910MaRDI QIDQ4117638

A. C. Ouano, Yih-O Tu

Publication date: 1977

Published in: IBM Journal of Research and Development (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1147/rd.212.0131

Mathematics Subject Classification ID

General biology and biomathematics (92B05)

Related Items (1)

Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution

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