Active control scheme for improving mass resolution of film bulk acoustic resonators
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Publication:414128
DOI10.1007/S10483-011-1454-9zbMath1237.93125OpenAlexW2043573905MaRDI QIDQ414128
Xue-feng He, Xian-fang Yin, Ke-wan Chen, Xing Liu, Zhi-yu Wen
Publication date: 10 May 2012
Published in: Applied Mathematics and Mechanics. (English Edition) (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10483-011-1454-9
Application models in control theory (93C95) Bulk waves in solid mechanics (74J10) Hydro- and aero-acoustics (76Q05)
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