Construction of an Asymptotic Model for the Oxidation Process of Silicon

DOI<link itemprop=identifier href="https://doi.org/10.1002/(SICI)1521-4001(199810)78:10<711::AID-ZAMM711>3.0.CO;2-3" /><711::AID-ZAMM711>3.0.CO;2-3 10.1002/(SICI)1521-4001(199810)78:10<711::AID-ZAMM711>3.0.CO;2-3zbMath0912.35151OpenAlexW2000340076MaRDI QIDQ4214706

Barbara E. E. Stoth, Wilhelm Merz, K. Pulverer

Publication date: 25 May 1999

Full work available at URL: https://doi.org/10.1002/(sici)1521-4001(199810)78:10<711::aid-zamm711>3.0.co;2-3

zbMATH Keywords

existenceuniquenessasymptotic analysisqualitative behaviourmoving mixed zoneoxidation process of siliconsharp reaction front

Mathematics Subject Classification ID

Stefan problems, phase changes, etc. (80A22) Asymptotic expansions of solutions to PDEs (35C20)

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