A spatial rule adaptation procedure for reliable production control in a wafer fabrication system
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Publication:4245586
DOI10.1080/002075498193129zbMath0939.90006OpenAlexW2169009956MaRDI QIDQ4245586
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Publication date: 10 July 2000
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/002075498193129
schedulingTaguchi experimental designsemiconductor wafer fabrication systemreliable dispatching rule
Deterministic scheduling theory in operations research (90B35) Reliability, availability, maintenance, inspection in operations research (90B25) Production models (90B30)
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