Interrelation of infinite and bounded medium models for atomic collision cascades

DOI10.1080/00411459808205643zbMath0947.76072OpenAlexW1978294212MaRDI QIDQ4261144

Lev G. Glazov

Publication date: 1 September 1999

Published in: Transport Theory and Statistical Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00411459808205643

zbMATH Keywords

deposited energybackscattered particlesbounded-medium caseimplanted ionsion-bombardment-induced collision cascadesrecoil densitysputtered particles

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Statistical mechanics of solids (82D20) Kinetic theory of gases in time-dependent statistical mechanics (82C40)

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