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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives - MaRDI portal

Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives

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Publication:4266649

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DOI<175::AID-NME585>3.0.CO;2-7 10.1002/(SICI)1097-0207(19990520)45:2<175::AID-NME585>3.0.CO;2-7zbMath0953.74052OpenAlexW2067695573MaRDI QIDQ4266649

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Publication date: 25 January 2001

Full work available at URL: https://doi.org/10.1002/(sici)1097-0207(19990520)45:2<175::aid-nme585>3.0.co;2-7

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