The Behaviour of the Etching Rate in a Model of Plasma Etching

DOI10.1002/ZAMM.19940741103zbMath0804.65106OpenAlexW1997444444MaRDI QIDQ4306788

Ulrich Langer

Publication date: 15 January 1995

Published in: ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/zamm.19940741103

zbMATH Keywords

boundary element methodparallel computationdomain decomposition methodscoupled boundary element - finite element - codes

Mathematics Subject Classification ID

Multigrid methods; domain decomposition for boundary value problems involving PDEs (65N55) Boundary value problems for second-order elliptic equations (35J25) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Parallel numerical computation (65Y05) Boundary element methods for boundary value problems involving PDEs (65N38)

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