scientific article; zbMATH DE number 665495

zbMath0805.65139MaRDI QIDQ4309759

Meinhard Paffrath

Publication date: 2 February 1995

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zbMATH Keywords

numerical resultsfinite elementmoving boundariesdopant diffusionmoving grid methoddoping profilesoxidation-diffusion problemoxide growthprocess simulator MIMAS-IItwo-dimensional process simulation

Mathematics Subject Classification ID

Stefan problems, phase changes, etc. (80A22) Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs (65M60) Free boundary problems for PDEs (35R35) Applications to the sciences (65Z05) Initial value problems for second-order parabolic equations (35K15) Mesh generation, refinement, and adaptive methods for the numerical solution of initial value and initial-boundary value problems involving PDEs (65M50)

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