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scientific article; zbMATH DE number 978487 - MaRDI portal

scientific article; zbMATH DE number 978487

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Publication:4332648

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zbMath0865.35134MaRDI QIDQ4332648

Unnamed Author, Elke Wilczok, Karl-Heinz Hoffmann, Hans-Joerg Bauer

Publication date: 9 April 1997

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

thermal oxidation of silicon dopant diffusion in polycrystalline silicon models for the diffusion of impurity atoms in silicon

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Free boundary problems for PDEs (35R35)

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