Fast movement strategies for a step‐and‐scan wafer stepper

DOI10.1111/1467-9574.00037zbMath0887.90141OpenAlexW2152545384MaRDI QIDQ4354869

J. B. M. Melissen, C. M. H. Kuijpers, Cor A. J. Hurkens

Publication date: 25 November 1997

Published in: Statistica Neerlandica (Search for Journal in Brave)

Full work available at URL: https://research.utwente.nl/en/publications/fast-movement-strategies-for-a-stepandscan-wafer-stepper(1dfaaa5c-5955-4233-943d-0573008f5a12).html

zbMATH Keywords

simulated annealingintegrated circuitsdetermination of fast movement strategiesgeneralized asymmetric traveling salesman

Mathematics Subject Classification ID

Programming involving graphs or networks (90C35) Applications of mathematical programming (90C90) Combinatorial optimization (90C27) Case-oriented studies in operations research (90B90)

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