Step bunching during the epitaxial growth of a generic binary-compound thin film

DOI10.1016/J.JMPS.2009.11.007zbMath1244.74068OpenAlexW1986938358MaRDI QIDQ442034

Paolo Cermelli, Michel E. Jabbour

Publication date: 8 August 2012

Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jmps.2009.11.007

zbMATH Keywords

chemical vapor depositionbunching instabilityehrlichgeneralized Gibbs-Thomson relationschwoebel barrierstep dynamics

Mathematics Subject Classification ID

Stability of dynamical problems in solid mechanics (74H55) Thin films (74K35)

Related Items (3)

Step Growth and Meandering in a Precursor-Mediated Epitaxy with Anisotropic Attachment Kinetics and Terrace Diffusion ⋮ Step bunching during the epitaxial growth of a generic binary-compound thin film ⋮ Epitaxy of binary compounds and alloys

Cites Work

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• Step bunching during the epitaxial growth of a generic binary-compound thin film
• The thermodynamics of elastic materials with heat conduction and viscosity
• The elastic energy-momentum tensor
• Coherent solid-state phase transitions with atomic diffusion: A thermomechanical treatment
• The role of the configurational force balance in the nonequilibrium epitaxy of films
• The nature of configurational forces
• Configuration forces as basic concepts of continuum physics
• A surface chemical potential for elastic solids
• Epitaxy of binary compounds and alloys
• Introduction to Step Dynamics and Step Instabilities
• Multispecies epitaxial growth on vicinal surfaces with chemical reactions and diffusion
• A Step‐Flow Model for the Heteroepitaxial Growth of Strained, Substitutional, Binary Alloy Films with Phase Segregation: I. Theory
• The growth of crystals and the equilibrium structure of their surfaces
• The force on an elastic singularity

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