A BEM technique for free-molecule flows in high frequency MEMS resonators

DOI10.1016/j.enganabound.2008.08.012zbMath1244.76043OpenAlexW2048968263MaRDI QIDQ443447

J. Herrera, H. S. Yoon

Publication date: 7 August 2012

Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.enganabound.2008.08.012

zbMATH Keywords

dissipationMEMSfree-molecule flow

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Boundary element methods applied to problems in fluid mechanics (76M15)

Related Items (3)

Non-continuum effects on a squeezed gas film in a two-dimensional acoustic resonator ⋮ An analytical and meshless modeling for vibration analysis of an infinite quartz resonator with non-circular electrodes ⋮ Integral equations for free-molecule flow in MEMS: recent advancements

Cites Work

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• Nonplanar oscillatory shear flow: From the continuum to the free-molecular regime
• On the evaluation of damping in MEMS in the slip-flow regime
• Generalization of Laplace's Expansion to Arbitrary Powers and Functions of the Distance between Two Points

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