A BEM technique for free-molecule flows in high frequency MEMS resonators
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Publication:443447
DOI10.1016/j.enganabound.2008.08.012zbMath1244.76043OpenAlexW2048968263MaRDI QIDQ443447
Publication date: 7 August 2012
Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.enganabound.2008.08.012
Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Boundary element methods applied to problems in fluid mechanics (76M15)
Related Items (3)
Non-continuum effects on a squeezed gas film in a two-dimensional acoustic resonator ⋮ An analytical and meshless modeling for vibration analysis of an infinite quartz resonator with non-circular electrodes ⋮ Integral equations for free-molecule flow in MEMS: recent advancements
Cites Work
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