A Homogenization Technique for the Boltzmann Equation for Low Pressure Chemical Vapor Deposition

DOI10.1137/S0036139902393476zbMath1075.76050OpenAlexW1989606976MaRDI QIDQ4441863

Christian Ringhofer, Matthias K. Gobbert

Publication date: 8 January 2004

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1137/s0036139902393476

zbMATH Keywords

diffusive boundary conditionmicrostructured surface

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Nonlinear first-order PDEs (35F20) Finite difference methods for initial value and initial-boundary value problems involving PDEs (65M06) Reaction effects in flows (76V05) Chemical kinetics in thermodynamics and heat transfer (80A30) Homogenization in context of PDEs; PDEs in media with periodic structure (35B27) Homogenization applied to problems in fluid mechanics (76M50)

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