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scientific article; zbMATH DE number 2031606 - MaRDI portal

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Publication:4446094

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zbMath1033.81527MaRDI QIDQ4446094

Eugene A. Grachev, D. M. Ustinin, A. I. Chulichkov

Publication date: 25 January 2004

Full work available at URL: http://mathnet.ru/eng/mm/v15/i5/p47

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

electron microscopy electron scattering electron beam lithography micro-engineering nano-engineering

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Applications of quantum theory to specific physical systems (81V99)

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