scientific article; zbMATH DE number 2052939

zbMATH Open1047.93039MaRDI QIDQ4454565

Paul Van den Hof, R. A. de Callafon

Publication date: 8 March 2004

Title of this publication is not available (Why is that?)

zbMATH Keywords

system identificationrobust control designservomechanismwafer stagechip manufacturing process

Mathematics Subject Classification ID

System identification (93B30) Application models in control theory (93C95) Design techniques (robust design, computer-aided design, etc.) (93B51)

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