Investigation of flow mechanisms in semiconductor wafer fabrication
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Publication:4468850
DOI10.1080/0020754031000065476zbMath1069.90042OpenAlexW2036381225MaRDI QIDQ4468850
J. F. Cox III, Seonmin Kim, K. Roscoe Davis
Publication date: 11 June 2004
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/0020754031000065476
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