A systems approach to photolithography process optimization in an electronics manufacturing environment
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Publication:4510507
DOI10.1080/00207540050031896zbMath0961.90502OpenAlexW2110088284MaRDI QIDQ4510507
A. R. Mileham, Ali Doniavi, L. B. Newnes
Publication date: 19 April 2001
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/00207540050031896
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