Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach

DOI10.1080/002075400418270zbMath1094.90536OpenAlexW2144009548MaRDI QIDQ4525587

Ming-Hung Lin, Li-Chen Fu

Publication date: 2000

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: http://ntur.lib.ntu.edu.tw/bitstream/246246/141050/1/16.pdf

Mathematics Subject Classification ID

Production models (90B30)

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Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability ⋮ Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing

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