Stress-Dependent Local Oxidation of Silicon

DOI10.1137/16M1060613zbMath1375.76041OpenAlexW2768925472MaRDI QIDQ4594900

John R. King, Jonathan D. Evans

Publication date: 27 November 2017

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1137/16m1060613

zbMATH Keywords

matched asymptotic expansionssilicon oxidationstress-dependent reaction coefficient

Mathematics Subject Classification ID

Stokes and related (Oseen, etc.) flows (76D07) Asymptotic expansions of solutions to PDEs (35C20)

Cites Work

• Unnamed Item
• Oxidation-induced stresses in the isolation oxidation of silicon
• The Isolation Oxidation of Silicon
• The Isolation Oxidation of Silicon: The Reaction-Controlled Case

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