Optimal design of induction heating equipment for high‐speed processing of a semiconductor

DOI10.1108/03321640410553472zbMath1152.78350OpenAlexW2164564258MaRDI QIDQ4665492

Norio Takahashi, Yoshifumi Okamoto, Kazuhiro Ozaki, Toshio Imai, Naoki Uchida, Hiroshi Ono, Daisuke Miyagi

Publication date: 11 April 2005

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321640410553472

zbMATH Keywords

optimal designinduction heating processes of semiconductor

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Statistical mechanics of semiconductors (82D37) Optimization problems in optics and electromagnetic theory (78M50)

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