General run-to-run (R2R) control framework using self-tuning control for multiple-input multiple-output (MIMO) processes

DOI10.1080/00207540410001708498zbMath1060.90574OpenAlexW2028900133MaRDI QIDQ4671320

Chih-Hung Jen, Shu-Kai S. Fan, Bernard C. Jiang

Publication date: 26 April 2005

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540410001708498

Mathematics Subject Classification ID

Production models (90B30) Realizations from input-output data (93B15)

Related Items (4)

Recursive parameter estimation for categorical process control ⋮ Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach ⋮ Combining on-line experiment and process control methods for changes in a dynamic model ⋮ Monitoring feedback-controlled processes using adaptiveT²schemes

This page was built for publication: General run-to-run (R2R) control framework using self-tuning control for multiple-input multiple-output (MIMO) processes