Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets

DOI10.1080/0020754042000264563zbMath1060.90593OpenAlexW2151477800MaRDI QIDQ4671391

Huiran Liu, Zhibin Jiang, Richard Ying Kit Fung

Publication date: 26 April 2005

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/0020754042000264563

Mathematics Subject Classification ID

Production models (90B30)

Related Items (3)

A dynamic WIP control strategy for bottlenecks in a wafer fabrication system ⋮ Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system ⋮ Minimizing total earliness and tardiness on re-entrant batch processing machine with time windows

Cites Work

• Performance analysis of scheduling policies in re-entrant manufacturing systems
• Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
• Adaptive production scheduling of virtual production systems using object-oriented Petri nets with changeable structure

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