Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage

DOI10.1002/ASJC.1595zbMath1398.93320OpenAlexW2753476128MaRDI QIDQ4686302

Frank Boeren, Lennart Blanken, Tom Oomen, Dennis Bruijnen

Publication date: 10 October 2018

Published in: Asian Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/asjc.1595

zbMATH Keywords

feedforward controllearning controlmechatronics

Mathematics Subject Classification ID

Learning and adaptive systems in artificial intelligence (68T05) Application models in control theory (93C95) Estimation and detection in stochastic control theory (93E10) Software, source code, etc. for problems pertaining to systems and control theory (93-04)

Related Items (1)

Iterative tuning of feedforward controller with precise time-delay compensation for precision motion system

This page was built for publication: Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage