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Electron beam lithography with a Gaussian current distribution for nanolithography - MaRDI portal

Electron beam lithography with a Gaussian current distribution for nanolithography

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Publication:468794

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DOI10.3103/S1062873812090201zbMath1298.78004MaRDI QIDQ468794

O. D. Potapkin

Publication date: 10 November 2014

Published in: Bulletin of the Russian Academy of Sciences: Physics (Search for Journal in Brave)

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electron optics (78A15)

Cites Work

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