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The Behaviour of the Etching Rate in a Model of Plasma Etching

From MaRDI portal
Publication:4698216

DOI10.1002/ZAMM.19940741103zbMATH Open0823.34052OpenAlexW1997444444MaRDI QIDQ4698216

Author name not available (Why is that?)

Publication date: 30 October 1995

Published in: (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/zamm.19940741103



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