Modeling the electrostatic deflection of a MEMS multilayers based actuator

DOI10.1155/2013/959232zbMath1299.74137OpenAlexW2115505518WikidataQ59029966 ScholiaQ59029966MaRDI QIDQ474778

Muhammad A. Hawwa, Hassen M. Ouakad, Hussain M. Al-Qahtani

Publication date: 24 November 2014

Published in: Mathematical Problems in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1155/2013/959232

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Related Items (2)

Dynamic analysis of multilayers based MEMS resonators ⋮ Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification

Uses Software

• Unnamed Item

Cites Work

• Dynamic pull-in phenomenon in MEMS resonators

This page was built for publication: Modeling the electrostatic deflection of a MEMS multilayers based actuator