An Elementary Model for Control of a Semiconductor Etching Process
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Publication:4787270
DOI10.1137/S0036144500382295zbMATH Open1127.80301OpenAlexW2084108138MaRDI QIDQ4787270
Author name not available (Why is that?)
Publication date: 5 January 2003
Published in: (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1137/s0036144500382295
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