Modeling aspects to improve the solution of the inverse problem in scatterometry

DOI10.3934/DCDSS.2015.8.497zbMath1304.35766OpenAlexW2326105196MaRDI QIDQ479110

Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, Markus Bär, Andreas Rathsfeld

Publication date: 5 December 2014

Published in: Discrete and Continuous Dynamical Systems. Series S (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.3934/dcdss.2015.8.497

zbMATH Keywords

inverse problemMonte Carlo methoduncertaintiesFisher matrixFourier opticsscatterometryerror modelline edge roughness

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Scattering theory for PDEs (35P25) Inverse problems for PDEs (35R30) Numerical methods for discrete and fast Fourier transforms (65T50) Scattering theory, inverse scattering involving ordinary differential operators (34L25)

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