Feasible Analytical Solutions for Electrostatic Parallel-Plate Actuator or Sensor

DOI10.1177/1077546304030943zbMath1064.74093OpenAlexW2040173733MaRDI QIDQ4822956

R. Y. Vinokur

Publication date: 26 October 2004

Published in: Journal of Vibration and Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1177/1077546304030943

zbMATH Keywords

nonlinear vibratory systemquality factor decrease

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Vibrations in dynamical problems in solid mechanics (74H45) Electromagnetic effects in solid mechanics (74F15) Explicit solutions of dynamical problems in solid mechanics (74H05)

Cites Work

• Isothermal squeeze films

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