scientific article; zbMATH DE number 922732

zbMath0853.65071MaRDI QIDQ4893264

James M. Sloss, John C. jun. Bruch, Chris A. Papadopoulos

Publication date: 8 December 1996

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

numerical resultsvariational inequalityparallel computerwet chemical etchingiterative numerical schemesemiconductor fabricationmanufacturing of microelectronic devices

Mathematics Subject Classification ID

Numerical optimization and variational techniques (65K10) Unilateral problems for linear parabolic equations and variational inequalities with linear parabolic operators (35K85) Parallel numerical computation (65Y05) Technical applications of optics and electromagnetic theory (78A55) Existence theories for optimal control problems involving partial differential equations (49J20) Discrete approximations in optimal control (49M25)

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Domain decomposition and heterogeneous modeling used in solving a moving boundary problem

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