scientific article; zbMATH DE number 7324756

MaRDI QIDQ4966193

S. G. Ovchinnikov, Sergeĭ N. Varnakov, Unnamed Author, Alexander Efremov

Publication date: 18 March 2021

Full work available at URL: http://mathnet.ru/eng/jsfu110

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

finite element methodmathematical modelingCADellipsometeroverload modeling

Mathematics Subject Classification ID

Mechanics of deformable solids (74-XX) Optics, electromagnetic theory (78-XX)

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