Scheduling of multiple in-line steppers for semiconductor wafer fabs

DOI10.1080/00207721.2012.724093zbMath1305.90159OpenAlexW2054286590MaRDI QIDQ5172568

Chie-Wun Chiou, Muh-Cherng Wu

Publication date: 4 February 2015

Published in: International Journal of Systems Science (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207721.2012.724093

zbMATH Keywords

schedulingsemiconductorflow shopgenetic algorithmmeta-heuristic algorithmsport capacity constraints

Mathematics Subject Classification ID

Approximation methods and heuristics in mathematical programming (90C59) Production models (90B30)

Cites Work

• Unnamed Item
• A discrete version of particle swarm optimization for flowshop scheduling problems
• A new heuristic method for the flow shop sequencing problem
• New evolutionary genetic algorithms for NP-complete combinatorial optimization problems
• A genetic algorithm for flowshop sequencing
• A genetic algorithm for the job shop problem
• Ant-colony algorithms for permutation flowshop scheduling to minimize makespan/total flowtime of jobs.
• A genetic algorithm for hybrid flowshops with sequence dependent setup times and machine eligibility
• Performance evaluation of photolithography cluster tools
• Scheduling semiconductor in-line steppers in new product/process introduction scenarios
• Survey of scheduling research involving setup times
• A fuzzy-neural knowledge-based system for job completion time prediction and internal due date assignment in a wafer fabrication plant