Approximation of Hopkins equation in Hilbert space and its application in polarized illumination modelling

DOI10.1080/00036810902889575zbMath1171.65100OpenAlexW2022119084MaRDI QIDQ5190735

Junjiang Lei, Jiechang Wen, Min A, Mingqing Xiao

Publication date: 27 July 2009

Published in: Applicable Analysis (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00036810902889575

zbMATH Keywords

numerical exampleHilbert-Schmidt kernelHermitian integral kernelHopkins integral equationmicro optical lithographyoptical exposure systempolarized illumination source

Mathematics Subject Classification ID

Numerical methods for integral equations (65R20) Integral operators (45P05) Integral operators (47G10) Physical optics (78A10) Integral equations with miscellaneous special kernels (45H05)

Uses Software

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Cites Work

• VECTOR VALUED REPRODUCING KERNEL HILBERT SPACES OF INTEGRABLE FUNCTIONS AND MERCER THEOREM
• Approximation from Shift-Invariant Spaces by Integral Operators
• The concept of partial coherence in optics

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