Projection lithography by means of parametric photon pairs

DOI10.1080/09500340500443128zbMath1137.78332OpenAlexW2009585291MaRDI QIDQ5290849

Naoki Fukutake

Publication date: 3 May 2006

Published in: Journal of Modern Optics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/09500340500443128

zbMATH Keywords

entanglementoptical systemquantum lithographycoherent pump

Mathematics Subject Classification ID

Quantum optics (81V80) Lasers, masers, optical bistability, nonlinear optics (78A60)

Cites Work

• The concept of partial coherence in optics
• On the diffraction theory of optical images

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