Hybrid-matrix algorithm for rigorous coupled-wave analysis of multilayered diffraction gratings
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Publication:5290855
DOI10.1080/09500340500407701zbMath1137.78318OpenAlexW1976836158MaRDI QIDQ5290855
Publication date: 3 May 2006
Published in: Journal of Modern Optics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/09500340500407701
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