Preemptive priority policy for hot lots transport services in 300mm semiconductor foundry

DOI10.1080/02522667.2004.10699622zbMath1138.90384OpenAlexW2000063674MaRDI QIDQ5293427

Chia-Nan Wang, Shing-Ko Liang

Publication date: 2 July 2007

Published in: Journal of Information and Optimization Sciences (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/02522667.2004.10699622

zbMATH Keywords

semiconductor manufacturingautomated material handling systemoverhead hoist transport

Mathematics Subject Classification ID

Production models (90B30)

Cites Work

• Unidirectional circular layout for overhead material handling systems
• Connecting transport AMHS in a wafer fab

This page was built for publication: Preemptive priority policy for hot lots transport services in 300mm semiconductor foundry