Reduced order model compensator control of species transport in a CVD reactor

DOI<143::AID-OCA671>3.0.CO;2-Y 10.1002/1099-1514(200007/08)21:4<143::AID-OCA671>3.0.CO;2-YzbMath1069.49508OpenAlexW1972027507MaRDI QIDQ5317787

Grace M. Kepler, Hien T. Tran, Harvey Thomas Banks

Publication date: 21 September 2005

Full work available at URL: https://doi.org/10.1002/1099-1514(200007/08)21:4<143::aid-oca671>3.0.co;2-y

zbMATH Keywords

proper orthogonal decompositionlinear-quadratic controlDirichlet boundary controlreduced order modelchemical vapour deposition

Mathematics Subject Classification ID

Stabilization of systems by feedback (93D15) Applications of optimal control and differential games (49N90) Linear-quadratic optimal control problems (49N10)

Related Items (6)

Control of laser surface hardening by a reduced-order approach using proper orthogonal decomposition ⋮ A reduced-basis discretization method for chemical vapor deposition reactor simulation ⋮ Balanced POD for linear PDE robust control computations ⋮ Reduced-order compensators via balancing and central control design for a structural control problem ⋮ Computation of POD basis functions for fluid flows with Lanczos methods ⋮ Reduced-order modeling of the upper tropical Pacific ocean model using proper orthogonal decomposition

Cites Work

• Modeling and control of physical processes using proper orthogonal decomposition
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