Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

DOI10.1108/03321640910940864zbMath1167.78322OpenAlexW2038174852MaRDI QIDQ5323856

Krzysztof Smółka, Sławomir Wiak

Publication date: 31 July 2009

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321640910940864

zbMATH Keywords

modellingforce measurementobject-oriented methodsvectors

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Electro- and magnetostatics (78A30)

Uses Software

• Simulink
• Finite Element Method Magnetics
• Unnamed Item

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