Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode*

DOI10.1177/1077546309106520zbMath1269.74099OpenAlexW2015638609MaRDI QIDQ5327585

Fehmi Najar, S. Choura, Eihab M. Abdel-Rahman, Sami El-Borgi, Ali Hasan Nayfeh

Publication date: 8 August 2013

Published in: Journal of Vibration and Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1177/1077546309106520

zbMATH Keywords

finite difference methodsecondary resonancedifferential quadrature methodmicroelectromechanical systemssimultaneous resonancemicroactuator

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Electromagnetic effects in solid mechanics (74F15) Numerical approximation of solutions of dynamical problems in solid mechanics (74H15)

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Cites Work

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